JPH079371Y2 - 真空容器窓用掃除具 - Google Patents
真空容器窓用掃除具Info
- Publication number
- JPH079371Y2 JPH079371Y2 JP11673489U JP11673489U JPH079371Y2 JP H079371 Y2 JPH079371 Y2 JP H079371Y2 JP 11673489 U JP11673489 U JP 11673489U JP 11673489 U JP11673489 U JP 11673489U JP H079371 Y2 JPH079371 Y2 JP H079371Y2
- Authority
- JP
- Japan
- Prior art keywords
- window
- cleaning tool
- vacuum container
- shaft
- window cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004140 cleaning Methods 0.000 title claims description 14
- 239000004033 plastic Substances 0.000 claims description 19
- 238000005452 bending Methods 0.000 claims description 5
- 239000002861 polymer material Substances 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 description 20
- 239000004065 semiconductor Substances 0.000 description 14
- 230000012010 growth Effects 0.000 description 10
- 238000001741 metal-organic molecular beam epitaxy Methods 0.000 description 10
- 239000010409 thin film Substances 0.000 description 8
- 239000004809 Teflon Substances 0.000 description 7
- 229920006362 Teflon® Polymers 0.000 description 7
- 239000000758 substrate Substances 0.000 description 6
- 239000004642 Polyimide Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000001451 molecular beam epitaxy Methods 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
- RGGPNXQUMRMPRA-UHFFFAOYSA-N triethylgallium Chemical compound CC[Ga](CC)CC RGGPNXQUMRMPRA-UHFFFAOYSA-N 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11673489U JPH079371Y2 (ja) | 1989-10-04 | 1989-10-04 | 真空容器窓用掃除具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11673489U JPH079371Y2 (ja) | 1989-10-04 | 1989-10-04 | 真空容器窓用掃除具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0356131U JPH0356131U (en]) | 1991-05-30 |
| JPH079371Y2 true JPH079371Y2 (ja) | 1995-03-06 |
Family
ID=31665000
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11673489U Expired - Lifetime JPH079371Y2 (ja) | 1989-10-04 | 1989-10-04 | 真空容器窓用掃除具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH079371Y2 (en]) |
-
1989
- 1989-10-04 JP JP11673489U patent/JPH079371Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0356131U (en]) | 1991-05-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |